The defending champion moved on to a final showdown against Swiss 11th seed Patty Schnyder, who knocked out ninth seed Elena Dementieva of Russia 7-6, 6-0.
Sharapova had little trouble defeating Chakvetadze, who appeared to be cramping late in the second after playing competitive tennis for three consecutive weeks.
Chakvetadze had played Fed Cup and won titles in Cincinnati and Stanford before arriving in San Diego.
After playing for more than two and a half hours in beating Wimbledon champion Venus Williams in a three-set quarter-final on Friday, she appeared to have lost some of her zip around the court.
Sharapova ended the contest with 26 winners to only five from Chakvetadze and broke her fellow 20-year-old five times.
While the 2006 US Open champion has maintained the world No 2 ranking, Sharapova has not won a title since Linz last October.
After a patchy season where she had only reached one semi-final prior to San Diego, the left-handed Schnyder has regained her form this week.
Against Dementieva, she mixed up the pace of her backhand and took big cuts with her forehand.
The 28-year-old Schnyder enters her match against Sharapova with a 1-5 record against the Russian, including a tough three-set loss at the French Open.
WASHINGTON: American wild card John Isner continued his improbable run through the Washington Open field by defeating Gael Monfils on Saturday to set up a match with top seed Andy Roddick in the final.
The 416th-ranked Isner, playing in only his second ATP tournament, beat the ninth-seeded Frenchman 6-7, 7-6, 7-6, while Roddick ousted big-serving Ivo Karlovic 7-6, 7-6.
Isner, 22, who gained entry into the event when Fernando Gonzalez withdrew with a sore back, had upset Tim Henman, No 8 seed Benjamin Becker and No 2 Tommy Haas en route to his semi-final appearance on Saturday.
Isner and the 54th-ranked Monfils traded aces and service winners throughout their two-hour, 26-minute match on a warm Washington evening.
Serves were so dominant there were no breaks until the 11th game of the final set when Monfils grabbed a 6-5 lead, but Isner broke right back to force the decisive tiebreaker.
When Isner won the final-set tiebreaker, 7-2, he dropped his racket and fell on his back as if he had just won the Wimbledon title. The capacity crowd rose to its feet and roared its approval.
Isner blasted 23 aces to win his fifth consecutive match this week in a third-set tiebreaker. Monfils nailed 25 aces in a losing effort.
The world No 5 Roddick fired a modest 12 aces in the match but more importantly won 98 percent of the points on his first serve.
Roddick trailed 4-1 in the first-set tiebreak but rallied to win 9-7 when the 6-ft-10 ins (2.08 metres) Karlovic punched a forehand beyond the baseline.
Cheered wildly by a partisan crowd, Roddick won the second-set tiebreak 7-5. He seized control at 6-5 on a brilliant running backhand down the line and won it on the next point when Karlovic whacked a weak forehand into the net.
The 24-year-old Roddick, who reached the semi-finals in Indianapolis last week, is 27-6 on hardcourts this season.
SOPOT (Poland): Spanish second seed Tommy Robredo and Argentina's Jose Acasuso pulled off contrasting straight-sets victories on Saturday to reach the final of the Polish Open.
Robredo held on to beat Gilles Simon 6-3, 7-6, edging out the unseeded Frenchman 7-4 in the second-set tie-break to seal the win.
Acasuso had a far more comfortable 6-1, 6-2 victory over Albert Montanes of Spain in just 61 minutes.
Acasuso won the title in Sopot in 2002 and lost in the final against Rafael Nadal two years later.
Simon, the 22-year-old who won his first ATP title in Marseille this year, said he had not started his match against Robredo aggressively enough.—Reuters